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经营范围
发明名称
CLEANING METHOD
摘要
PROBLEM TO BE SOLVED: To properly remove contaminants on a semiconductor substrate. SOLUTION: The surface of a semiconductor substrate is cleaned by blowing liquid nitrogen against the substrate.
申请公布号
JP2001274135(A)
申请公布日期
2001.10.05
申请号
JP20010027706
申请日期
2001.02.05
申请人
OKI ELECTRIC IND CO LTD
发明人
OGURA KEN
分类号
B08B3/08;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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