| 发明名称 |
EXCIMER LASER DEVICE, ALIGNER AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE |
| 摘要 |
PROBLEM TO BE SOLVED: To obtain a KrF excimer laser device in which corrosion due to F of its discharge electrodes is prevented at low costs. SOLUTION: As the discharge electrodes 4, Cu electrodes whose surface contains an element at L. Pauling's electronegativity of 1.2 or more are used. |
| 申请公布号 |
JP2001274487(A) |
申请公布日期 |
2001.10.05 |
| 申请号 |
JP20000085254 |
申请日期 |
2000.03.24 |
| 申请人 |
TOSHIBA CORP |
发明人 |
HASUNUMA MASAHIKO;KANEKO HISAFUMI;OIWA NORIHISA |
| 分类号 |
G03F7/20;H01L21/027;H01S3/038;H01S3/225;(IPC1-7):H01S3/038 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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| 地址 |
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