METHOD FOR FORMING OPTICAL WAVEGUIDE

摘要

PROBLEM TO BE SOLVED: To form optical waveguides of diversified shapes and sizes with lesser thermal damage on an optical device. SOLUTION: A wafer 7 is placed on a susceptor 6 and a chamber 1 is evacuated to replace the inside of the chamber 1 with argon. An organic system source, such as TEOS gas or TEOG gas is introduced into the chamber 1. When the organic source is irradiated with an excimer lamp 2, the organic source 9 is cracked and an insulating film 8 is deposited on the surface of the wafer 7 on the susceptor 6. The wafer is thereafter subjected to desired patterning, by which the optical waveguide 9 is formed. The good-quality optical waveguide having the lesser thermal damage by excimer light CVD is thus formed.