| 摘要 |
PROBLEM TO BE SOLVED: To stably maintain the position and attitude of a vibration damping table with good repeatability, without impairing advantages, such as vibration damping performance, vibration insulating performance and high rigidity of a vibration control support means. SOLUTION: This vibration damping device is provided with a vibration control support means 2 for supporting a vibration damping table 1 on a foundation 7, while reducing the vibration of the vibration damping table 1 mounted with equipment. A displacement regulating mechanism 3 of high rigidity which is not displaced significantly by external acting force is provided between the vibration control support means and the vibration damping table 1 or the foundation to regulate relative displacement between them. The displacement regulating mechanism 3 is provided with a detecting means 4 for detecting the relative displacement of the vibration damping table 1 and the foundation 7, a compensating means 5 for applying appropriate compensating operation to a detection signal to output it, and a drive circuit 6 for driving the displacement regulating mechanism 3 on the basis of the output signal. The position and attitude of the vibration damping table 1 is thereby maintained in a prescribed state. |
