| 摘要 |
PROBLEM TO BE SOLVED: To decrease leakage field from a high-frequency induction coil, to prevent a sample in a chamber, etc., from receiving adverse effects, and to improve the efficiency of energy transfer to plasma. SOLUTION: On the outer periphery of a high-frequency induction coil 21 mounted in the vicinity of the end outer periphery of a plasma torch 10-jetting a sample gas and a gas for plasma, a cylindrical ferromagnetic member 23 is disposed so as to surround the coil 21. |
