| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a low-cost cassette apparatus with which the presence of several substrates housed in the cassettes can be detected, without causing loss in time for the operations of a robot transferring the substrates. SOLUTION: In a position opposite to a robot 6 between two cassettes 1, which house several substrates 2 and are placed in parallel to each other, a detection unit having detection sensors 7 and 8 corresponding to several stages is moved by a driving means and performs detection of substrates, in the cassettes in one corner of the cassettes 1.</p> |
