| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a dynamic physical quantity converter which more improves the bond strength and obtains a satisfactory yield. SOLUTION: In the anode bonding, the bond strength closely relates to the number of oxygen ions contained in a silicon oxide film 11. For forming the amorphous silicon oxide film 11 on the surface of a top glass 30, an adequate quantity of nitrous oxide is added to monosilane gas and the silicon oxide film 11 is formed. This increases the number of oxygen ions transferring in the anodic bonding to improve the bonding strength of a silicon substrate 2 to the top glass 30 with the silicon oxide film 11 formed thereon, thereby improving the yield of the converter.
|
