RESONATOR AND ITS MANUFACTURING METHOD AND ELECTRONIC DEVICE WITH THE RESONATOR

摘要

PROBLEM TO BE SOLVED: To provide a thin film zinc oxide resonator having higher crystalline performance and orientation without giving any effect on its resistivity and to provide its manufacturing method. SOLUTION: This invention discloses the manufacturing method of the resonator. This method includes a step that provides a substrate base (50) having a dielectric layer. Then an adhesive layer (115) is formed on the dielectric layer and a new creation promoting film (120) is formed on the adhesive layer. Succeedingly a zinc oxide layer (125) is formed on the new creation promoting film and an upper side conductive layer (130) is formed on the zinc oxide layer.