| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus which achieves a fast and effective profilometry by low-coherent space interference method. SOLUTION: This apparatus is provided with a light source 21 having a wide spectral range, an interference optical system, in which a light beam emitted from the light source 21 is divided into a signal light via a specimen 27 and a control light via an optical path differing from the optical path thereof, while the signal light via the specimen is made to cross the control light spatially to interfere and makes a frequency shifter 28 to relatively shift the frequencies of the signal light and the control light. Also included are an optical imaging system, in which the angular dispersion element is so arranged on a plane with the signal light superposing the control signal such that the signal light and the control light transmitting or reflecting to/from the angular dispersion element form an image on a detecting surface, an optical sensor which performs a heterodyne detection of the imaged interference light and a signal processing system, which consolidates a plurality of received signals obtained by the optical sensor to generate a signal light, corresponding to each point of interest on a propagation path of the signal light on the surface or in an internal layer of the specimen.
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