摘要 |
PROBLEM TO BE SOLVED: To provide a compact monitor for light which can correctly measure light as a specklless light of uniform intensity. SOLUTION: A beam splitter 4 of a half mirror is fixed in the optical path of a main beam 2. A reflecting mirror 5 is fixed to the side of the beam splitter 4. An entrance 6a of an integrating sphere type optical attenuator 6 is set to the opposite side, and a reflector 7 is set movably on a side opposite to the entrance 6a along a reflecting spherical surface 6b of an integrating sphere. An optical sensor 8 is set on a part of the reflecting spherical surface 6b.
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