| 摘要 |
PROBLEM TO BE SOLVED: To adequately cool plural cooling regions in a vacuum pump with only a single cooling liquid supply system. SOLUTION: A cooler 44 is installed in a rotor housing 12, and a cooler 45 is installed in a rear housing 14 and a driving part 33. A cooler 46 is installed in a controller 37, and a cooler 47 is installed in an inverter 38. A cooler 48 is mounted on the circumferential surface of a motor M. The coolers 46, 47, 48 are placed midway in a main supply pipe 49. The coolers 44, 45 are placed midway in a sub-supply pipe 50. A polenoid three-way valve 51 placed in the branch part of the main supply pipe 49 and the sub-supply pipe 50 receives exiting demagnetization control of the controller 37. |
