发明名称 IMPROVED MICROLENS UPON A PHOTODETECTOR
摘要 An array of photosensitive devices may be formed with improved fill factors by including a diffractive microlens which may have a stepped configuration. The microlens may be formed of a sol-gel material having a photoinitiator, or other materials that may be defined with low temperature techniques commonly used in connection with photoresist. In particular, a gray scale mask may be used to define a plurality of steps in the resulting microlens which have different diffractive characteristics.
申请公布号 EP1138086(A1) 申请公布日期 2001.10.04
申请号 EP19990948195 申请日期 1999.09.09
申请人 INTEL CORPORATION 发明人 ASSADI, AZAR;RAJ, KANNAN
分类号 G02B5/18;G02B3/08;G03F7/20;H01L27/14;H01L27/146;H01L31/0216;H01L31/0232;H04N1/031;H04N5/225;H04N5/335 主分类号 G02B5/18
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