| 发明名称 |
METHOD FOR MODIFYING THE SURFACE OF A FLUOROCARBON |
| 摘要 |
A method of modifying the surface of a fluorocarbon by depositing the fluorocarbon on a substrate in the form of a layer having an exposed, fluorine atom-containing surface, and treating the exposed surface with a non-aqueous etchant to strip the fluorine atoms and create a modified surface. |
| 申请公布号 |
WO0173836(A1) |
申请公布日期 |
2001.10.04 |
| 申请号 |
WO2001US08065 |
申请日期 |
2001.03.13 |
| 申请人 |
INTEL CORPORATION;WONG, LAWRENCE, D. |
发明人 |
WONG, LAWRENCE, D. |
| 分类号 |
H01L21/311;H01L21/312;H01L21/768 |
主分类号 |
H01L21/311 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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