发明名称 LARGE-SIZE MONOATOMIC AND MONOCRYSTALLINE LAYER, MADE OF DIAMOND-TYPE CARBON AND DEVICE FOR MAKING SAME
摘要 Monoatomic and monocrystalline layer of large size, in diamond type carbon, and method for the manufacture of this layer. According to the invention, a monocrystalline substrate ( 2 ) is formed in SiC terminated by an atomic plane of carbon according to a reconstruction c(2x2) and at least one annealing is carried out, capable of transforming this atomic plane, which is a plane of dimers C≡C (4) of sp configuration, into a plane of dimers C-C (8) of sp<SUP>3 </SUP>configuration. Application to microelectronics, optics, optoelectronics, micromechanics and biomaterials.
申请公布号 EP1137826(A1) 申请公布日期 2001.10.04
申请号 EP19990973081 申请日期 1999.12.01
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;CENTRE NATIONAL DE<BR>LA RECHERCHE SCIENTIFIQUE (CNRS) 发明人 DERYCKE, VINCENT;DUJARDIN, GERALD;MAYNE, ANDREW;SOUKIASSIAN, PATRICK
分类号 C30B29/04;C30B1/00;C30B1/10;C30B33/00;H01L29/16 主分类号 C30B29/04
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