发明名称 |
LARGE-SIZE MONOATOMIC AND MONOCRYSTALLINE LAYER, MADE OF DIAMOND-TYPE CARBON AND DEVICE FOR MAKING SAME |
摘要 |
Monoatomic and monocrystalline layer of large size, in diamond type carbon, and method for the manufacture of this layer. According to the invention, a monocrystalline substrate ( 2 ) is formed in SiC terminated by an atomic plane of carbon according to a reconstruction c(2x2) and at least one annealing is carried out, capable of transforming this atomic plane, which is a plane of dimers C≡C (4) of sp configuration, into a plane of dimers C-C (8) of sp<SUP>3 </SUP>configuration. Application to microelectronics, optics, optoelectronics, micromechanics and biomaterials. |
申请公布号 |
EP1137826(A1) |
申请公布日期 |
2001.10.04 |
申请号 |
EP19990973081 |
申请日期 |
1999.12.01 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE;CENTRE NATIONAL DE<BR>LA RECHERCHE SCIENTIFIQUE (CNRS) |
发明人 |
DERYCKE, VINCENT;DUJARDIN, GERALD;MAYNE, ANDREW;SOUKIASSIAN, PATRICK |
分类号 |
C30B29/04;C30B1/00;C30B1/10;C30B33/00;H01L29/16 |
主分类号 |
C30B29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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