发明名称 CONTINUOUS PROCESSING OF THIN-FILM BATTERIES AND LIKE DEVICES
摘要 <p>A system for making a thin-film device includes a substrate-supply station that supplies a substrate having a major surface area. The substrate has a first layer on a first surface area of the substrate's major surface area. Also included is a device for depositing a second layer onto the first layer, wherein the device supplies energy to the second layer to aid in layer formation without substantially heating the substrate.</p>
申请公布号 WO2001073865(A2) 申请公布日期 2001.10.04
申请号 US2001009438 申请日期 2001.03.23
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