Method of evaluating adsorption of contaminant on solid surface

摘要

A test piece made of a material equal to the material of the workpiece is formed in a size that permits the test piece to be housed in an adsorption tube container mounted to a mass analyzing apparatus of a gas chromatograph. The test piece is left to stand for a predetermined time in a measuring site of the atmosphere within a cleansing chamber and, then, recovered. The recovered test piece is introduced into a mass analyzing apparatus of a gas chromatograph (GC-MS apparatus) for measurement of the material of the contaminant and the mass of the contaminant, thereby evaluating the degree of contamination of the measured point.