发明名称 Method and apparatus for screen printing
摘要 A screen printing apparatus and method for forming printed wiring on a substrate, such as a wafer. The apparatus includes a reservoir disposed beneath a screen having a plurality of openings forming a pattern thereon. Disposed within the reservoir is a printing paste. The screen is pressed into the printing paste such that convex structures are formed on the upper surface of the screen, and are printable onto the substrate. A wiper is also movably disposed within the reservoir, cooperating with the screen to establish contact between the screen and the substrate.
申请公布号 US2001025574(A1) 申请公布日期 2001.10.04
申请号 US20010863094 申请日期 2001.05.22
申请人 MICRON TECHNOLOGY, INC. 发明人 BALL MICHAEL B.
分类号 H01L21/48;H05K3/12;(IPC1-7):B41L13/18;B05C17/04;B41L27/00 主分类号 H01L21/48
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