Micromechanically manufacturable optical beam splitter has reflective aluminum coated silicon nitride membrane with dot pattern of openings

摘要

A beam divider splits incident rays (47) into at least two outgoing parts (48,49) using a flat functional element (40) having a dot pattern of openings. The regions between the openings are essentially reflective, at least on the incoming side, and reflect the light striking them as a parallel outgoing beam (48). An independent claim is also included for a process of producing the splitter above comprising forming the element above with an opaque or reflective surface and then forming a dot pattern of openings.