发明名称 |
Apparatus and method for maintaining a dry atmosphere to prevent moisture absorption and allow demoisturization of electronic components |
摘要 |
<p>The apparatus and method of the present invention relates use of a warm and dry atmosphere in electronic component storage areas. The warm and dry atmosphere provides the benefit of eliminating the baking process and other moisture management issues by removing moisture from the components. In accordance with one aspect of the present invention, a component storage system includes an enclosed component storage area and a dry gas delivery system for delivery of a dry gas to the storage area to prevent moisture from being absorbed by the components, and a temperature control system for controlling a temperature of the dry gas to about 10 DEG C to about 60 DEG C. <IMAGE></p> |
申请公布号 |
EP1139395(A2) |
申请公布日期 |
2001.10.04 |
申请号 |
EP20010400764 |
申请日期 |
2001.03.23 |
申请人 |
L'AIR LIQUIDE, SOCIETE ANONYME POUR<BR>L'ETUDE ET L'EXPLOITATION DES PROCEDES<BR> GEORGES CLAUDE |
发明人 |
THERIAULT, MARTIN;BOYCE, KRISTEN;RABIA, STEPHANE |
分类号 |
H01L21/50;B62B5/00;B62B3/00;B65G1/00;F26B25/00;H01L21/00;H01L21/673;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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