Electrical material sensor used for determining the concentration of a component in a gas mixture has an intermediate layer arranged between a sensor function layer and a structural element

摘要

Electrical material sensor has an intermediate layer (8) arranged between a sensor function layer (10) and a structural element (2). The intermediate layer contains the material component of the function layer as well as the material component of the structural element. The intermediate layer has a higher electrical resistance than the sensor function layer. Preferred Features: The structural element is a substrate or an electrically insulating layer. The intermediate layer is 1-100 mu m thick. The substrate is made from Al2O3, MgO, ZrO2 or AlN. The sensor function layer is a doped or non-doped metal oxide, double metal oxide, multiple metal oxide, zeolite or ion-conducting oxide.