Electrostatic actuator and method of driving the same

摘要

A plurality of groups each including of first, second and third stator electrodes (22A to 22C) sequentially arranged in a predetermined direction are mounted to a first stator (2A). An extended electrode (26D) extending in the predetermined direction is mounted to a second stator (2B) arranged to face the first stator (2A). A slider (3) is movably arranged between the first and second stators (2A and 2B). The slider (3) is provided with a large number of slider electrodes (30A) arranged to face the first to third stator electrodes (22A to 22C) and a second slider electrode (30D) facing the extended electrode (26D). The slider electrodes (30A and 30D) are maintained at the ground potential. A first driving voltage is periodically applied to the stator electrodes (22A to 22C), and a second driving voltage is applied to the extended electrode (26D). The first and second driving voltages are opposite to each other in phase and are periodically switched between the ground potential and the positive driving voltage, with the result that the slider (3) is moved forward in the predetermined direction while being vibrated between the first and second stators (2A and 2B). <IMAGE>