| 摘要 |
<p>A method for preparing a zinc oxide semi-conductor material which comprises introducing an organic metal-containing compound containing zinc as the metal to a reaction vessel (1), vaporizing the zinc-containing organic compound and effecting a specific decomposition reaction on a substrate (3), to thereby form a zinc oxide semi-conductor material on the substrate, characterized as employing, as the above zinc-containing organic compound, a zinc-containing organic compound which exhibits a low reactivity with oxygen in a vapor phase under the temperature condition in the reaction vessel (1).</p> |
