| 发明名称 |
Thin-film patterning method, manufacturing method of thin-film device and manufacturing method of thin-film magnetic head |
| 摘要 |
At least one strippable film on a surface of a thin film to be patterned is formed, then the at least one strippable film and the thin film to be patterned is patterned by using FIB, and thereafter the at least one strippable film is removed.
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| 申请公布号 |
US2001027029(A1) |
申请公布日期 |
2001.10.04 |
| 申请号 |
US20010772858 |
申请日期 |
2001.01.31 |
| 申请人 |
KAMIJIMA AKIFUMI |
发明人 |
KAMIJIMA AKIFUMI |
| 分类号 |
G11B5/31;C23F4/00;G03F7/09;G03F7/20;H01L21/033;H01L21/302;(IPC1-7):H01L21/302;H01L21/461 |
主分类号 |
G11B5/31 |
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