发明名称 |
Aluminum alloy used in the production of anodizing layers for components of chemical reactors and/or plasma reactors for producing semiconductor wafers contains magnesium as an alloying addition |
摘要 |
Aluminum alloy contains magnesium as an alloying addition in an amount of 1.4-2.9 %. The sum of all further elements in the alloy is not more than 300 ppm and the concentration of the individual elements does not exceed 40 ppm with the exception of aluminum and magnesium. Preferred Features: The anodizing layers produced have a thickness of 5-300, preferably 25-90 mu m.
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申请公布号 |
DE10014356(A1) |
申请公布日期 |
2001.10.04 |
申请号 |
DE20001014356 |
申请日期 |
2000.03.24 |
申请人 |
VENTEC GESELLSCHAFT FUER VENTUREKAPITAL UND UNTERNEHMENSBERATUNG |
发明人 |
ARLT, JOACHIM;BUSSE, KARL-HERRMANN;WALTHER, RALF |
分类号 |
C22C21/06;(IPC1-7):C22C21/06;B01J19/02 |
主分类号 |
C22C21/06 |
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