Stocker, exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method

摘要

A stocker includes a first sealing member, an atmosphere control member for controlling the internal atmosphere of the first sealing member to a first atmosphere, and a transfer member for transporting an object to be stocked to an exposure apparatus or receiving it from the exposure apparatus without exposing it to the external atmosphere of the first sealing member. At least one object to be stocked is stocked in the first sealing member.