| 摘要 |
A process for the production of a coated substrate by depositing an electrically conductive metal oxide layer on to a surface of a substrate by a low pressure deposition process performed in a coating atmosphere containing a gaseous hydrocarbon. Coated substrates produced by this process have less batch to batch variation in conductivity. The preferred metal oxide is indium tin oxide, the preferred hydrocarbon is methane and the preferred substrate is glass. Preferably, the substrate is at a temperature of below 250 DEG C. |
