Thermally actuated microvalve assembly

摘要

A microvalve having a generally planar plate valve body defining a chamber and a plate valve member movable in the chamber about a pivot axis that is perpendicular to the valve body to control the flow of a fluid through the valve body. The plate valve member defines a pair of opposite faces, a first duct therethrough provides fluid communication between the opposite faces to equalize fluid pressures acting on the opposite faces in the region of the first duct. The plate valve member also has a second duct therethrough that provides fluid communication between the opposite faces to equalize fluid pressures acting on the opposite faces in the region of the second duct. The first duct and the second duct are equidistant from the pivot axis.