PURE WATER RECOVERING/REGENERATING/FEEDING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a pure water recovering/regenerating/feeding device having a simple regenerating process of the pure water recovered from a device using pure water and capable of controlling and feeding a pressure to devices using the regenerated pure water independently for each regenerated pure water feed line. SOLUTION: This pure water recovering/regenerating/feeding device recovering and regenerating the pure water discharged from the device using pure water and feeding the regenerated pure water to the pure water using devices using pure water is provided with a pure water recovering/regenerating device 34. The pure water discharged from the pure water using devices (polishing devices 10 and 20) in the same process Pr1 is recovered, impurities are removed from the recovered pure water by the pure water recovering/ regenerating device 34, and the regenerated pure water is fed to the pure water using devices (polishing devices 10 and 20) in the same process Pr1 through regenerated pure water feed lines 32 and 33.