发明名称 |
Evaporation source, apparatus and method for the preparation of organic El device |
摘要 |
An evaporation source includes an insulating container adapted to receive a volume of source material therein and a heater closely disposed around the container for heating and evaporating the source material into a vapor. The effective contact area of the container in contact with the source material is correlated to the volume of source material. The evaporation source is useful in the preparation of organic EL devices.
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申请公布号 |
US6296894(B1) |
申请公布日期 |
2001.10.02 |
申请号 |
US19990372141 |
申请日期 |
1999.08.11 |
申请人 |
TDK CORPORATION |
发明人 |
TANABE HIROSHI;TOKURA SATOSHI;FUKUYU KENGO;HORITA AKIHIRO;KOISHI MASAAKI;SASAKI TORU |
分类号 |
C23C14/24;C23C14/54;H01L51/50;H05B33/10;H05B33/12;H05B33/14;(IPC1-7):C23C16/00 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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