| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a laser beam machining device capable of increasing machining speed and eliminating as much as possible positional restrictions of an optical system. SOLUTION: The device includes a polarizing beam splitter 2 for spectrally dispersing a laser beam from a laser generator 1 into first and second polarizing components, a galvano-scanner 4 for oscillating the first polarizing component to biaxial direction so that it is emitted to a desired position on a workpiece 3, a galvano-scanner 5 for oscillating the second polarizing component to biaxial direction so that it is emitted to a prescribed position on the workpiece, a collimator lens 7 for projecting the first polarizing component as a virtual image in a polarizing beam splitter 6, and a collimator lens 8 for projecting the second polarizing component as a virtual image in the polarizing beam splitter 6. The polarizing beam splitter 6 superimpose the first and second polarizing components from the collimator lenses 7, 8 so that they are in a common optical path, and emits two kinds of laser beams. An fθlens 9 emits the two kinds of laser beams from the polarizing beam splitter 6 to the workpiece.</p> |
