PROTECTIVE FILM FOR INSULATING SUBSTRATE, THIN FILM LAMINATE, AND THIN FILM SENSOR

摘要

PROBLEM TO BE SOLVED: To attain a protective film which is applied to electronic parts and a thin film sensor with an insulating substrate, improves the wear resistance and the sliding characteristic of the parts and the sensor. and has high adhesion. SOLUTION: The protective film 4 for protecting the surface of a thin film sensor where a detection film 2 for metal gage, etc., and a wiring film 3 are formed on an insulating glass disc 1 has a two-layer structure consisting of an intermediate layer 41 on the glass disc 1 and a surface layer 42. An insulating thin film of SiO2, SiN, etc., is used as the intermediate layer 41 to secure insulating property and adhesive strength, and a DLC(Diamond Like Carbon) thin film is used as the surface layer 42 to improve wear resistance and sliding characteristic.