发明名称 |
In-situ nano-interconnected circuit devices and method for making the same |
摘要 |
A circuit device is disclosed comprising at least two circuit layers interconnected with a plurality of substantially equi-length nanowires disposed therebetween. The nanowires may comprise composites, e.g., having a heterojunction present along the length thereof, to provide for a variety of device applications. Also disclosed is a method for making the circuit device comprising growing a plurality of nanowires in-situ on at least one circuit substrate and then interconnecting the nanowires to a mating substrate.
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申请公布号 |
US6297063(B1) |
申请公布日期 |
2001.10.02 |
申请号 |
US19990426453 |
申请日期 |
1999.10.25 |
申请人 |
AGERE SYSTEMS GUARDIAN CORP. |
发明人 |
BROWN WALTER L.;JIN SUNGHO;ZHU WEI |
分类号 |
H01L25/18;H01L21/98;H01L23/498;H01L23/52;H01L23/538;H01L25/065;H01L25/07;H01L29/06;(IPC1-7):H01L21/00 |
主分类号 |
H01L25/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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