| 发明名称 |
MICROMECHANICAL CAP STRUCTURE AND ITS MANUFACTURING METHOD |
| 摘要 |
PROBLEM TO BE SOLVED: To increase the stability of a micromechanical cap structure provided with a substrate, particularly a substrate in the shape of a wafer, having cavities each comprising one base face and two opposite parallel side wall segments. SOLUTION: Each cavity K has at least one of stabilized wall segments SK1, SK2; S1-S4 connecting two side wall segments.
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| 申请公布号 |
JP2001269900(A) |
申请公布日期 |
2001.10.02 |
| 申请号 |
JP20010027356 |
申请日期 |
2001.02.02 |
| 申请人 |
ROBERT BOSCH GMBH |
发明人 |
PINTER STEFAN DR;EMMERICH HARALD;TRAH HANS-PETER;BAUMANN HELMUT DR |
| 分类号 |
G01P9/04;B81B3/00;B81B7/00;B81C1/00;G01P1/02;G01P15/08;H01L23/02;H01L23/10;(IPC1-7):B81C1/00 |
主分类号 |
G01P9/04 |
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