发明名称 Method and device for simultaneously cutting off a multiplicity of wafers from a workpiece
摘要 A method is for simultaneously cutting off a multiplicity of wafers from a hard, brittle workpiece which has a longitudinal axis and a peripheral surface. The workpiece is guided, by means of a translational relative movement, directed perpendicular to the longitudinal axis, between the workpiece and a wire web of a wire saw with the aid of a feed device, through the wire web which is formed by a sawing wire. The workpiece is rotated about the longitudinal axis while the wafers are being cut off. There is also a wire saw which is suitable for carrying out the method and has a device for holding and for rotating the workpiece about the longitudinal axis.
申请公布号 US6295977(B1) 申请公布日期 2001.10.02
申请号 US19990434582 申请日期 1999.11.04
申请人 WACKER CHEMIE GMBH;WACKER SILTRONIC GESELLSCHAFT FüR HALBLEITERMATERIALIEN AG 发明人 RIPPER BERT;ANDRAE CHRISTIAN;EGGLHUBER KARL;LUNDT HOLGER;KOELKER HELMUT;GREIM JOCHEN
分类号 B24B27/06;B23D57/00;B28D5/00;B28D5/04;(IPC1-7):B28D1/06 主分类号 B24B27/06
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