| 摘要 |
A surface-tracking measuring machine is provided, in which measurement range is enlarged while keeping a measuring force, responsivity, resolution thereof. For the object, the surface-tracking measuring machine has a frame (10), a probe (11) swingably supported by the frame (10) and having a tracer (15) at an end thereof, a measuring force controller (21) for controlling the measuring force applied to the probe, a displacement detector (31) for detecting a displacement of the probe, a measuring force detector (41) for detecting the measuring force applied to the probe, and a controller (51) for comparing a measuring force detected value detected by the measuring force detector and a previously commanded measuring force command value and to control the measuring force controller so that the measuring force detected value is equal to the measuring force command value.
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