| 摘要 |
PROBLEM TO BE SOLVED: To ensure the smooth movement of a moving body 33 by mounting vertical guide rails 28, 28 on an inner face of a cover plate 3 of a vacuum vessel 1, which are hardly deflected even when the cover plate 3 is deflected by the pressure difference between the inner and outer parts of the vacuum vessel 1 in a case when the moving body 33 for conveying an article is guided and moved on the guide rails 28, 28. SOLUTION: An intermediate plate 8 is supported on an inner face of the cover plate 3 at corner parts by means of four supporting bolts 9, 9... in such manner that it can be kept into contact with or separated from the inner face, while positioned by two upper and lower positioning shafts 19, 20, and guide rails 28, 28 are mounted and fixed to the intermediate plate 8. Whereby the deformation of the cover plate 3 deflected by the pressure difference is hardly transmitted to the intermediate plate 8, and the deformation of the intermediate plate 8 and the guide rails 28, 28 can be prevented.
|
