发明名称 |
Precision alignment of microcolumn tip to a micron-size extractor aperture |
摘要 |
A method and an accompanied apparatus for aligning an electron emitter with an extractor hole of a microcolumn. Four V-grooves, defined together with the window for forming the membrane and having bottoms situated on two axis are microfabricated on a chip. The axis intersect at a right angle and defines a center point for the extractor hole. The V-grooves are then used as references to align the electron emitter with the extractor hole, one axis at a time. The emitter is precisely aligned to the extractor hole because the extractor hole was formed with reference to the V-grooves. The thickness of the chip is used as the spacing reference between the emitter and the extractor.
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申请公布号 |
US6297584(B1) |
申请公布日期 |
2001.10.02 |
申请号 |
US20000675567 |
申请日期 |
2000.09.29 |
申请人 |
ETEC SYSTEMS, INC. |
发明人 |
KIM HO-SEOB;LEE KIM Y.;CHANG T. H. P. |
分类号 |
H01J9/14;H01J9/18;H01J37/04;H01J37/067;H01J37/073;(IPC1-7):H01J37/06 |
主分类号 |
H01J9/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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