| 摘要 |
<p>PURPOSE: A fluid controller used for a semiconductor manufacturing apparatus is provided to easily reconstruct or install more lines without interrupting other processes. CONSTITUTION: A lower step member of one line(A,B,C,P) is attached on one of auxiliary substrates(3) by a screw. Upper step members(11,12,13,14,15,16,17,18,19) are attached on the lower step members by screws. Each auxiliary substrate is attached on one main substrate(2), and a passage connection means(50) can be removed upward. In case of increasing lines, a line to be added is attached on an auxiliary substrate, and the auxiliary substrate is attached on a main substrate. In changing lines, each auxiliary substrate of each old line is separated and attached to an auxiliary substrate of a new line. Therefore, the increase and change of lines is performed easily.</p> |
