PYROELECTRIC INFRARED DETECTOR ELEMENT AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a pyroelectric infrared detector element which avoids accumulating charges on a pyroelectric substrate to reduce the popcorn noise and greatly improve the detection reliability. SOLUTION: The pyroelectric infrared detector element has an infrared sensing part formed with conductive patterns facing the front and back sides of a single crystal lithium tantalate pyroelectric substrate having a z-plane on a main opposite surface. High-density control lattice defects are formed in the vicinity of the substrate surface or the entire area in the substrate. The crystal lattice defects are formed by implanting ions of hydrogen, oxygen, tantalum, sodium or potassium.