DEVICE FOR PRODUCING SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To enhance controllability of temperature in the central zone of a heater. SOLUTION: In a device for producing a semiconductor where a substrate is treated while being held horizontally, thickness of a thermal insulation layer 2 provided on the outside of a heater 1 for heating the substrate is differentiated in the central zone b of the heater 1 and at other parts thereof.