| 摘要 |
PROBLEM TO BE SOLVED: To regenerate a kick-back energy in a pulse laser power supplying without additionally providing a polarity inverting circuit. SOLUTION: A pulse laser power supply comprises a pulse generating circuit 1 for generating a pulse voltage with ON-control of a semiconductor switch SW via a reactor Lo from an initially charged charging/discharging capacitor Co, and a magnetic compressing circuit 3 for supplying the pulse voltage to a pulse laser generator 4 through magnetic compression. The charging/ discharging capacitor Co is changed to inverse polarity with the kick-back energy from the pulse laser generator 4. The pulse laser power supply is provided with a means for regenerating energy via a diode Ds for a rectifying circuit of a high voltage DC power supply 2 connected in parallel with the charging/discharging capacitor Co.
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