发明名称 |
METHOD FOR GROWING BULK CRYSTAL OF COMPOUND SEMICONDUCTOR, AND METHOD FOR MANUFACTURING COMPOUND SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To obtain a long bulk crystal by executing growth of a multielement bulk crystal continuously and stably when the multielement bulk crystal is formed by a zone melting regrowth method. SOLUTION: A multielement material supply layer having a composition substantially identical to that of a multielement bulk crystal being formed is formed by dissolving a mixture of multielement material completely and then quenching it. The multielement material supply layer is brought into contact with a melt where the multielement bulk crystal is deposited thus compensating for variation in the composition of the melt due to deposition of the multielement bulk crystal. |
申请公布号 |
JP2001267259(A) |
申请公布日期 |
2001.09.28 |
申请号 |
JP20000074435 |
申请日期 |
2000.03.16 |
申请人 |
FUJITSU LTD |
发明人 |
NISHIJIMA YOSHITO |
分类号 |
C30B13/28;H01L21/208;H01L33/30;H01S5/323 |
主分类号 |
C30B13/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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