发明名称 METHOD FOR GROWING BULK CRYSTAL OF COMPOUND SEMICONDUCTOR, AND METHOD FOR MANUFACTURING COMPOUND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To obtain a long bulk crystal by executing growth of a multielement bulk crystal continuously and stably when the multielement bulk crystal is formed by a zone melting regrowth method. SOLUTION: A multielement material supply layer having a composition substantially identical to that of a multielement bulk crystal being formed is formed by dissolving a mixture of multielement material completely and then quenching it. The multielement material supply layer is brought into contact with a melt where the multielement bulk crystal is deposited thus compensating for variation in the composition of the melt due to deposition of the multielement bulk crystal.
申请公布号 JP2001267259(A) 申请公布日期 2001.09.28
申请号 JP20000074435 申请日期 2000.03.16
申请人 FUJITSU LTD 发明人 NISHIJIMA YOSHITO
分类号 C30B13/28;H01L21/208;H01L33/30;H01S5/323 主分类号 C30B13/28
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