DEVICE FOR PRODUCING SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To reduce down time incident to maintenance of the device for producing a semiconductor by making possible to replace a susceptor without exposing a reaction chamber to the atmosphere. SOLUTION: The device for producing a semiconductor comprises a reaction tube 31, a susceptor 11 for supporting a substrate disposed in the reaction tube, an adapter 35 for supporting the susceptor 11 and moving it up and down, and a substrate carrying robot having a susceptor replacing tweezer 28 for transferring the substrate onto the susceptor 11. The susceptor 11 is replaced utilizing the substrate carrying robot. The tweezer 28 is inserted into the reaction tube 31 and the susceptor 11 is received on the tweezer 28 by lowering the adapter 35. The adapter 35 is lowered furthermore and the susceptor 11 is freed from the adapter 35 and then the susceptor 11 is drawn out from the reaction tube 31 along with the susceptor 11.