发明名称 FLAME-RETARDANT ENERGY BEAM-CURABLE RESIN COMPOSITION FOR RESIST AND RESIST COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide an energy beam-curable resin composition of a resist excellent in flame retarding performance without using a halogen-containing flame retarder. SOLUTION: The flame-retardant energy beam-curable resin composition contains a compound containing an ethylenic double bond, a phosphorus atom and a carboxyl group in one molecule and is obtained by reacting a compound having an ethylenically unsaturated double bond and a carboxyl group in one molecule with a phosphorus compound containing a functional group having reactivity with the ehylenically unsaturated double bond of the above compound.
申请公布号 JP2001264976(A) 申请公布日期 2001.09.28
申请号 JP20000072131 申请日期 2000.03.15
申请人 DAINIPPON INK & CHEM INC 发明人 SEKIGUCHI HISAFUMI;ICHINOSE EIJU;ISHIKAWA HIDENORI
分类号 G03F7/027;C08F2/46;C08F30/02;C08F299/02;C08G59/42;G03F7/004 主分类号 G03F7/027
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