| 摘要 |
PURPOSE: A structure of a condenser microphone and a method of manufacturing the structure are provided to minimize the size of the condenser microphone, reduce manufacturing costs and improve characteristics of the condenser microphone and reliability. CONSTITUTION: A condenser microphone includes a case(120), a conductive rear plate ring(130), a diaphragm(140), an insulating spacer(150), a rear plate(160), an FET(200), and a printed circuit board(180). One end of the case is sealed with a plate having a sound wave inlet formed at the center and the other end is opened. The rear plate ring is placed inside the end at which the sound wave inlet is formed. The diaphragm is set at one side of the rear plate ring to be vibrated by sound waves incoming through the sound wave inlet. The rear plate is placed having a predetermined distance from the diaphragm according to the spacer. The FET is fabricated in such a manner that a source electrode(201) and a drain electrode are formed on one side of a wafer using a bump bonder, a gate electrode is formed on the side opposite to the source and drain electrodes, and the wafer is sawed using a dicing saw machine. The printed circuit board on which source and drain terminals(181,182) connected to the source and drain electrodes of the FET are formed.
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