发明名称 ORGANIC ELECTROLUMINESCENCE DISPLAY PANEL AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a highly efficient organic EL display panel without characteristic degradation, such as current leak and poor luminescence, and its manufacturing method. SOLUTION: The manufacturing method has a process for forming a 1st electrode on a substrate, an organic layer formation process for forming an organic layer by vacuum evaporation, a luminescence layer formation process for forming each of luminescence layers according to the kind of luminescence color in a requested domain, and a process for forming a 2nd electrode. Here, the above organic layer is formed by the angle vacuum evaporation method for performing vacuum evaporation at an angle larger than a predetermined angle to the perpendicular direction of the substrate.
申请公布号 JP2001267071(A) 申请公布日期 2001.09.28
申请号 JP20000081931 申请日期 2000.03.23
申请人 TOHOKU PIONEER CORP 发明人 OSHITA ISAMU;MURAYAMA TATSUFUMI
分类号 H05B33/10;C23C14/06;C23C14/24;H01L27/32;H01L51/00;H01L51/50;H01L51/56;H05B33/12;H05B33/14;H05B33/22 主分类号 H05B33/10
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