DEVICE AND METHOD FOR MICRO-POSITIONING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a micro-positioning device for extremely precisely and accurately displacing and positioning an article whose load is large with the precision of an Angstrom level and to provide a micro-positioning method using the micro-positioning device. SOLUTION: This micro-positioning device is constituted of an elastic displacement table which can be displaced without any friction and a supermagnetostriction actuator, and the elastic displacement table is displaced and positioned according to the deformation of a rod installed in the supermagnetostriction actuator. Also, the rod installed in the supermagnetostriction actuator is deformed by applying prescribed currents to the supermagnetostriction actuator so that the elastic displacement table can be finely displaced, and the resultant position is defined as a stand and position. Then, a current value to be applied is changed so that the elastic displacement table can be freely and finely displaced with the standard position as a center by this micro-positioning method.