METHOD/DEVICE FOR SORTING DATA, METHOD/DEVICE FOR PROCESSING SIGNAL, METHOD/DEVICE FOR DETECTING POSITION, METHOD/DEVICE FOR PROCESSING IMAGE, METHOD/DEVICE FOR EXPOSURE AND METHOD FOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To precisely detect the position, etc., of a mark formed on a matter. SOLUTION: Concerning the featured value data of the feature point of a signal waveform obtained by picking up the images of marks MX and MY by an image pickup device AS, a disorder calculation device 36 calculates the disorder of a data value in each data set of a dividing result by each mode of data division while changing the mode of data division, and calculates the sum of them. Then, a sorting arithmetic unit 37 sorts a feature point by the mode of data division, where the sum of disorder is minimized, to sort signal data and noise data in the featured value data. A position calculating device 38 calculates a mark position based on the position of the feature point judged to be the signal data by the S/N discrimination of a disorder standard like this.