摘要 |
PROBLEM TO BE SOLVED: To provide a stacked piezoelectric actuator which has a superior durability and can be manufactured at a low cost. SOLUTION: In the stacked piezoelectric actuator 10 having piezoelectric ceramic layers 11 and inner electrodes 12a, 12b alternately stacked, and outer electrodes 13a, 13b to which the inner electrodes 12a, 12b are connected every layer, stress relaxing layers 14 are formed between the adjacent inner electrodes 12a, 12b as little as one layer between 10-40 layers of inner electrodes 12a, 12b.
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