| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a conventional device where a plasma treatment chamber is provided along with a cleaning/drying treatment chamber has a complicated configuration, and is expensive since the conventional apparatus as an air conveyance robot for transferring to the cleaning/drying treatment chamber, a vacuum robot installed in the plasma treatment chamber, and an air conveyance robot installed in the cleaning drying treatment chamber. SOLUTION: A lock chamber is shared, and the air conveyance robot for transfer and the air conveyance robot installed in a washing/drying device are shared, thus providing a further compact and inexpensive treating device. |
